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i-line stepper exposure machine fpa-3000i5  (Canon inc)

 
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    Structured Review

    Canon inc i-line stepper exposure machine fpa-3000i5
    I Line Stepper Exposure Machine Fpa 3000i5, supplied by Canon inc, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
    https://www.bioz.com/product/i-line+exposure+system/i+ray+stepper+exposure+device+fpa+3000+i5/us11908877-729-4-10
    Average 90 stars, based on 1 article reviews
    i-line stepper exposure machine fpa-3000i5 - by Bioz Stars, 2026-09
    90/100 stars

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    other:

    Article Title: Ink jet recording head manufacturing method
    Article Snippet: Next, the pattern of the nozzle forming material layer 8 was exposed under 5500 J/m2 by the wavelength of 365 nm using the i-line exposure system made by Canon Inc. (FIG. 3E), and heated for 4 minutes at 90° C., and then developed with the MIBK, so that the discharge port 9 was formed as shown in FIG. 3F.



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